Ultra-Low-Power Logic with Contactless Capacitive MEMS - Archive ouverte HAL
Communication Dans Un Congrès Année : 2023

Ultra-Low-Power Logic with Contactless Capacitive MEMS

Résumé

We report the simulation, design, fabrication and performance assessment of capacitive MEMS, carrying out contactless electromechanical computing with ultra-low-power consumption. The novel concept is implemented on silicon using on-purpose differential comb-drive actuators. This shift in the paradigm allows near-zero power dissipation by asymptotically suppressing static and dynamic energy losses which are inherently present in current hardware for logic implementation. Furthermore, this novel approach based on capacitive information encoding allows recovery of the invested charges by the power supply asymptotically suppressing dynamic losses and opening the way towards adiabatic operation. At the very least, the contactless operation resolves the reliability issues in existing electromechanical logics based on N/MEMS relays.
Fichier principal
Vignette du fichier
PMEMS2022_A.Markovic.pdf (681.5 Ko) Télécharger le fichier
Origine Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03946985 , version 1 (19-04-2023)

Identifiants

Citer

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩
182 Consultations
80 Téléchargements

Altmetric

Partager

More