A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter
Résumé
We present a high-voltage-generation-and-multiplexing (HVGM) chip,
specifically designed for electrostatic actuation of micro-robots. It
can individually control 12 pairs of +/- electrodes using a positive and
negative charge pump and mux-structure, consumes 286nW in steady state
and 533nW when transitioning a 10pF electrode at 155V/s, and produces a
differential voltage of 103V (29× voltage gain from 3.6V) in
measurement. We also show a complete microsystem of stacked die,
measuring 3×1.4×1.1mm, including HVGM, processor, radio, and harvester
for energy autonomous operation.