A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter - Archive ouverte HAL
Communication Dans Un Congrès Année : 2022

A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter

Résumé

We present a high-voltage-generation-and-multiplexing (HVGM) chip, specifically designed for electrostatic actuation of micro-robots. It can individually control 12 pairs of +/- electrodes using a positive and negative charge pump and mux-structure, consumes 286nW in steady state and 533nW when transitioning a 10pF electrode at 155V/s, and produces a differential voltage of 103V (29× voltage gain from 3.6V) in measurement. We also show a complete microsystem of stacked die, measuring 3×1.4×1.1mm, including HVGM, processor, radio, and harvester for energy autonomous operation.
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Dates et versions

hal-03932824 , version 1 (10-01-2023)

Identifiants

  • HAL Id : hal-03932824 , version 1

Citer

Yimai Peng, Gordy Carichner, Yejoong Kim, Li-Yu Chen, Rémy Tribhout, et al.. A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter. Symposium on VLSI Technology and Circuits, Jul 2022, Honolulu, United States. ⟨hal-03932824⟩
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