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Communication Dans Un Congrès Année : 2022

Gas Sensor Based on Silicon Nitride Integrated Long Period Grating

Résumé

In this paper, we demonstrate the potential of silicon nitride integrated long period grating (LPG) for gas sensing applications. The proposed LPG relies on the coupling of the single core mode propagating in the silicon nitride layer to cladding mode(s) by using a periodic sinusoidal width-modulation of the LPG core as pattern. This LPG is then used as CO2 sensor. Here, as a proof of concept, the cladding layer is itself a porous medium functionalized to CO2 using Polyhexamethylene Biguanide polymer. Preliminary experimental results show a constant sensitivity of 6.3 fm/ppm over CO2 concentration ranging from [0-20%].
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Dates et versions

hal-03901407 , version 1 (15-12-2022)

Identifiants

Citer

Clement Deleau, Han Cheng Seat, Frederic Surre, Franck Carcenac, Pierre-François Calmon, et al.. Gas Sensor Based on Silicon Nitride Integrated Long Period Grating. IEEE Sensors 2022, Oct 2022, Dallas, United States. ⟨10.1109/sensors52175.2022.9967080⟩. ⟨hal-03901407⟩
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