Piezoelectric Micromachined Ultrasonic Transducers with Center Support Membrane
Résumé
We present a piezoelectric micromachined ultrasonic transducers (pMUTs) with center support membrane. A finite element model has been created in COMSOL Multiphysics. Its vibration membrane is connected with other structures only through the central support column or wall. Since the outer edge of the membrane is not clamped, the membrane can have large vibration amplitude. Compared with the traditional clamped pMUTs, this center support structure has a larger average vibration amplitude and higher electromechanical coupling coefficient. According to the simulation results, the pMUTs with center support have an order of magnitude larger average vibration amplitude than traditional pMUTs with clamped circular and rectangular membranes. Besides, their electromechanical coupling factor k2t are 0.5808% and 0.4185%, which is also ahead of the traditional ones. The structure proposed in this paper has significant advantages in ultrasound emission and energy conversion efficiency, and is conducive to various airborne applications.
Domaines
Sciences de l'ingénieur [physics]Format du dépôt | Notice |
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Type de dépôt | Communication dans un congrès |
Titre |
en
Piezoelectric Micromachined Ultrasonic Transducers with Center Support Membrane
|
Résumé |
en
We present a piezoelectric micromachined ultrasonic transducers (pMUTs) with center support membrane. A finite element model has been created in COMSOL Multiphysics. Its vibration membrane is connected with other structures only through the central support column or wall. Since the outer edge of the membrane is not clamped, the membrane can have large vibration amplitude. Compared with the traditional clamped pMUTs, this center support structure has a larger average vibration amplitude and higher electromechanical coupling coefficient. According to the simulation results, the pMUTs with center support have an order of magnitude larger average vibration amplitude than traditional pMUTs with clamped circular and rectangular membranes. Besides, their electromechanical coupling factor k2t are 0.5808% and 0.4185%, which is also ahead of the traditional ones. The structure proposed in this paper has significant advantages in ultrasound emission and energy conversion efficiency, and is conducive to various airborne applications.
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Auteur(s) |
Yan Wang
1
, Wei-Jiang Xu
2, 3, 4
, Leming He
1
, Junyan Ren
1
1
State Key Laboratory of ASIC and System
( 446331 )
- Shanghai
- Chine
2
TPIA - IEMN -
Transduction, Propagation et Imagerie Acoustique - IEMN
( 1067371 )
- Groupe TPIA -- UPHF
Bâtiment Lottmann
59313 Valenciennes cedex
- France
3
IEMN -
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
( 1066983 )
- [Univ. Lille, CNRS, Centrale Lille Institut, Junia, Univ. Polytechnique Hauts-de-France] ––
Laboratoire Central – Cité Scientifique – Avenue Poincaré – CS 60069 – 59652 VILLENEUVE D’ASCQ CEDEX
- France
4
INSA Hauts-De-France -
INSA Institut National des Sciences Appliquées Hauts-de-France
( 1051411 )
- Voirie Communale Université Val Mont Houy,
59300 Aulnoy-Lez-Valenciennes
- France
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Langue du document |
Anglais
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Vulgarisation |
Non
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Comité de lecture |
Oui
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Invité |
Non
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Audience |
Internationale
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Actes |
Oui
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Page/Identifiant |
1-3
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Titre du congrès |
2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)
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Date début congrès |
2022-10-25
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Date fin congrès |
2022-10-28
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Ville |
Nangjing
|
Pays |
Chine
|
Domaine(s) |
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Éditeur commercial |
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Financement |
|
DOI | 10.1109/ICSICT55466.2022.9963194 |
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