<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-03872818</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-07T22:50:52+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">ToF-SIMS Li Depth Profiling of Pure and Methylated Amorphous Silicon Electrodes After Their Partial Lithiation</title>
            <author role="aut">
              <persName>
                <forename type="first">Yue</forename>
                <surname>Feng</surname>
              </persName>
              <idno type="halauthorid">2524766-0</idno>
              <affiliation ref="#struct-1162"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Bon Min</forename>
                <surname>Koo</surname>
              </persName>
              <idno type="halauthorid">1315568-0</idno>
              <affiliation ref="#struct-1162"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Antoine</forename>
                <surname>Seyeux</surname>
              </persName>
              <email type="md5">da912a9a03098acf9c669b044062b49a</email>
              <email type="domain">chimieparistech.psl.eu</email>
              <idno type="idhal" notation="numeric">771854</idno>
              <idno type="halauthorid" notation="string">843686-771854</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-3062-8961</idno>
              <idno type="IDREF">https://www.idref.fr/109262409</idno>
              <idno type="VIAF">https://viaf.org/viaf/204019670</idno>
              <idno type="ISNI">http://isni.org/isni/0000000140893884</idno>
              <affiliation ref="#struct-260669"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jolanta</forename>
                <surname>Światowska</surname>
              </persName>
              <email type="md5">abf175fc83f460d5a6eee1e44f489ea8</email>
              <email type="domain">chimieparistech.psl.eu</email>
              <idno type="idhal" notation="string">jolanta-swiatowska</idno>
              <idno type="idhal" notation="numeric">741418</idno>
              <idno type="halauthorid" notation="string">41373-741418</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-3727-0499</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=sPi9xEYAAAAJ&amp;hl=fr</idno>
              <idno type="IDREF">https://www.idref.fr/191911712</idno>
              <affiliation ref="#struct-260669"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Catherine</forename>
                <surname>Henry de Villeneuve</surname>
              </persName>
              <email type="md5">30ac6892977cba76ad1bb84a30ecb12f</email>
              <email type="domain">polytechnique.edu</email>
              <idno type="idhal" notation="string">catherine-henry-de-villeneuve</idno>
              <idno type="idhal" notation="numeric">750413</idno>
              <idno type="halauthorid" notation="string">1679708-750413</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-8668-3070</idno>
              <idno type="IDREF">https://www.idref.fr/185964109</idno>
              <affiliation ref="#struct-1162"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Michel</forename>
                <surname>Rosso</surname>
              </persName>
              <email type="md5">87c5cf2eee1cc24d6b8e53d9f96e6f4e</email>
              <email type="domain">polytechnique.fr</email>
              <idno type="idhal" notation="string">michel-rosso</idno>
              <idno type="idhal" notation="numeric">3780</idno>
              <idno type="halauthorid" notation="string">6015-3780</idno>
              <idno type="IDREF">https://www.idref.fr/169343847</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0886-1588</idno>
              <idno type="VIAF">https://viaf.org/viaf/308302221</idno>
              <affiliation ref="#struct-1162"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">François</forename>
                <surname>Ozanam</surname>
              </persName>
              <email type="md5">b75078fd5edcdfa28300c099f9ffa456</email>
              <email type="domain">polytechnique.edu</email>
              <idno type="idhal" notation="string">francois-ozanam</idno>
              <idno type="idhal" notation="numeric">180185</idno>
              <idno type="halauthorid" notation="string">2225602-180185</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-0002-8372</idno>
              <idno type="IDREF">https://www.idref.fr/034074384</idno>
              <affiliation ref="#struct-1162"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Jolanta</forename>
                <surname>Swiatowska</surname>
              </persName>
              <email type="md5">abf175fc83f460d5a6eee1e44f489ea8</email>
              <email type="domain">chimieparistech.psl.eu</email>
            </editor>
            <funder ref="#projanr-50950"/>
            <funder>Délégation Générale de l’Armement (DGA) is gratefully acknowledged for financial support.</funder>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-11-25 22:04:24</date>
              <date type="whenModified">2026-01-21 03:39:25</date>
              <date type="whenReleased">2022-12-06 09:13:20</date>
              <date type="whenProduced">2022-08-10</date>
              <date type="whenEndEmbargoed">2023-02-10</date>
              <ref type="file" target="https://hal.science/hal-03872818v1/document">
                <date notBefore="2023-02-10"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-03872818v1/file/Feng_TOF-SIMS_Rev_HAL.pdf" id="file-3872818-3399235">
                <date notBefore="2023-02-10"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="801430">
                <persName>
                  <forename>Jolanta</forename>
                  <surname>Swiatowska</surname>
                </persName>
                <email type="md5">abf175fc83f460d5a6eee1e44f489ea8</email>
                <email type="domain">chimieparistech.psl.eu</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-03872818</idno>
            <idno type="halUri">https://hal.science/hal-03872818</idno>
            <idno type="halBibtex">feng:hal-03872818</idno>
            <idno type="halRefHtml">&lt;i&gt;ACS Applied Materials &amp; Interfaces&lt;/i&gt;, 2022, 14 (31), pp.35716-35725. &lt;a target="_blank" href="https://dx.doi.org/10.1021/acsami.2c08203"&gt;&amp;#x27E8;10.1021/acsami.2c08203&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">ACS Applied Materials &amp; Interfaces, 2022, 14 (31), pp.35716-35725. &amp;#x27E8;10.1021/acsami.2c08203&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3872818-3399235"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="X">École polytechnique</idno>
            <idno type="stamp" n="ENSCP" corresp="PARISTECH">Chimie ParisTech</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="ENSC-PARIS">Ecole Nationale Supérieure de Chimie de Paris</idno>
            <idno type="stamp" n="X-PMC" corresp="X">Laboratoire de Physique de la Matière Condensée (PMC)</idno>
            <idno type="stamp" n="X-DEP-CHIM">Département de chimie de l’École polytechnique</idno>
            <idno type="stamp" n="X-DEP-PHYS">Département de physique de l’École polytechnique</idno>
            <idno type="stamp" n="PARISTECH">ParisTech</idno>
            <idno type="stamp" n="INC-CNRS">Institut de Chimie du CNRS</idno>
            <idno type="stamp" n="PSL">Université Paris sciences et lettres</idno>
            <idno type="stamp" n="IP_PARIS">Institut Polytechnique de Paris</idno>
            <idno type="stamp" n="ENSCP-PSL" corresp="PSL">Chimie ParisTech - PSL</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
            <idno type="stamp" n="DEPARTEMENT-DE-MATHEMATIQUES">Collection du Département de Mathématiques</idno>
            <idno type="stamp" n="IP-PARIS-DEPARTEMENT-MATHEMATIQUES">Département de Mathèmatiques</idno>
            <idno type="stamp" n="IP-PARIS-PHYSIQUE">IP Paris Département de Physique</idno>
            <idno type="stamp" n="IP-PARIS-CHIMIE-ET-PROCEDES">IP Paris Département de Chimie et Procédés</idno>
            <idno type="stamp" n="E4C">Energy4Climate (E4C)</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">ToF-SIMS Li Depth Profiling of Pure and Methylated Amorphous Silicon Electrodes After Their Partial Lithiation</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Yue</forename>
                    <surname>Feng</surname>
                  </persName>
                  <idno type="halauthorid">2524766-0</idno>
                  <affiliation ref="#struct-1162"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Bon Min</forename>
                    <surname>Koo</surname>
                  </persName>
                  <idno type="halauthorid">1315568-0</idno>
                  <affiliation ref="#struct-1162"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Antoine</forename>
                    <surname>Seyeux</surname>
                  </persName>
                  <email type="md5">da912a9a03098acf9c669b044062b49a</email>
                  <email type="domain">chimieparistech.psl.eu</email>
                  <idno type="idhal" notation="numeric">771854</idno>
                  <idno type="halauthorid" notation="string">843686-771854</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-3062-8961</idno>
                  <idno type="IDREF">https://www.idref.fr/109262409</idno>
                  <idno type="VIAF">https://viaf.org/viaf/204019670</idno>
                  <idno type="ISNI">http://isni.org/isni/0000000140893884</idno>
                  <affiliation ref="#struct-260669"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jolanta</forename>
                    <surname>Światowska</surname>
                  </persName>
                  <email type="md5">abf175fc83f460d5a6eee1e44f489ea8</email>
                  <email type="domain">chimieparistech.psl.eu</email>
                  <idno type="idhal" notation="string">jolanta-swiatowska</idno>
                  <idno type="idhal" notation="numeric">741418</idno>
                  <idno type="halauthorid" notation="string">41373-741418</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-3727-0499</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=sPi9xEYAAAAJ&amp;hl=fr</idno>
                  <idno type="IDREF">https://www.idref.fr/191911712</idno>
                  <affiliation ref="#struct-260669"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Catherine</forename>
                    <surname>Henry de Villeneuve</surname>
                  </persName>
                  <email type="md5">30ac6892977cba76ad1bb84a30ecb12f</email>
                  <email type="domain">polytechnique.edu</email>
                  <idno type="idhal" notation="string">catherine-henry-de-villeneuve</idno>
                  <idno type="idhal" notation="numeric">750413</idno>
                  <idno type="halauthorid" notation="string">1679708-750413</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-8668-3070</idno>
                  <idno type="IDREF">https://www.idref.fr/185964109</idno>
                  <affiliation ref="#struct-1162"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Michel</forename>
                    <surname>Rosso</surname>
                  </persName>
                  <email type="md5">87c5cf2eee1cc24d6b8e53d9f96e6f4e</email>
                  <email type="domain">polytechnique.fr</email>
                  <idno type="idhal" notation="string">michel-rosso</idno>
                  <idno type="idhal" notation="numeric">3780</idno>
                  <idno type="halauthorid" notation="string">6015-3780</idno>
                  <idno type="IDREF">https://www.idref.fr/169343847</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0886-1588</idno>
                  <idno type="VIAF">https://viaf.org/viaf/308302221</idno>
                  <affiliation ref="#struct-1162"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">François</forename>
                    <surname>Ozanam</surname>
                  </persName>
                  <email type="md5">b75078fd5edcdfa28300c099f9ffa456</email>
                  <email type="domain">polytechnique.edu</email>
                  <idno type="idhal" notation="string">francois-ozanam</idno>
                  <idno type="idhal" notation="numeric">180185</idno>
                  <idno type="halauthorid" notation="string">2225602-180185</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-0002-8372</idno>
                  <idno type="IDREF">https://www.idref.fr/034074384</idno>
                  <affiliation ref="#struct-1162"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">66743</idno>
                <idno type="issn">1944-8244</idno>
                <idno type="eissn">1944-8252</idno>
                <title level="j">ACS Applied Materials &amp; Interfaces</title>
                <imprint>
                  <publisher>Washington, D.C. : American Chemical Society</publisher>
                  <biblScope unit="volume">14</biblScope>
                  <biblScope unit="issue">31</biblScope>
                  <biblScope unit="pp">35716-35725</biblScope>
                  <date type="datePub">2022-08-10</date>
                  <date type="dateEpub">2022-07-26</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1021/acsami.2c08203</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">methylated amorphous silicon</term>
                <term xml:lang="en">lithium diffusion</term>
                <term xml:lang="en">ToF-SIMS</term>
                <term xml:lang="en">lithiation front</term>
                <term xml:lang="en">thin-film electrode</term>
                <term xml:lang="en">lithium-ion battery</term>
              </keywords>
              <classCode scheme="halDomain" n="chim.anal">Chemical Sciences/Analytical chemistry</classCode>
              <classCode scheme="halDomain" n="chim.mate">Chemical Sciences/Material chemistry</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Pure (a-Si:H) and methylated (a-Si0.95(CH3)0.05:H) amorphous silicon thin films were analyzed by time-of-flight secondary ion mass spectrometry (ToF-SIMS) after partial lithiation. Depth profiling gives insight into the lithiation mechanism of the material enabling to study the detailed biphasic process in the first lithiation process. Lithiation induces swelling and roughening of the active layer. In both a-Si:H and a-Si0.95(CH3)0.05:H, no measurable Li diffusion was observed after stopping current-induced lithiation.  After applying the same lithiation charges, distinct Li profiles were observed for these two materials. Unlike a-Si:H, the Li concentration drops slowly from the heavily lithiated region to the non-lithiated region in a-Si0.95(CH3)0.05:H. This apparent progressive transition between the lithiated and lithium-free regions is attributed to the presence of nanovoids inside the material. When their concentration is high enough, these nanovoids constitute favorable quasi-percolating paths for lithium during the first lithiation. A specific model was developed to simulate the Li depth profiles, fully supporting this hypothesis.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-1162" status="VALID">
          <idno type="IdRef">183270126</idno>
          <idno type="RNSR">199719341R</idno>
          <idno type="ROR">01z5d0q66</idno>
          <orgName>Laboratoire de physique de la matière condensée</orgName>
          <orgName type="acronym">LPMC</orgName>
          <desc>
            <address>
              <addrLine>Route de Saclay 91128 PALAISEAU CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://pmc.polytechnique.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300340" type="direct"/>
            <relation active="#struct-563936" type="indirect"/>
            <relation name="UMR7643" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-260669" status="VALID">
          <idno type="ISNI">000000010412392X</idno>
          <idno type="RNSR">201420753B</idno>
          <idno type="ROR">https://ror.org/02s6m8n84</idno>
          <orgName>Institut de Recherche de Chimie Paris</orgName>
          <orgName type="acronym">IRCP</orgName>
          <date type="start">2014-01-01</date>
          <desc>
            <address>
              <addrLine>Chimie ParisTech - PSL, 11 rue Pierre et Marie Curie, 75005 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://ircp.cnrs.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300372" type="direct"/>
            <relation active="#struct-564132" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR8247 " active="#struct-441569" type="direct"/>
            <relation active="#struct-542949" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300340" status="VALID">
          <idno type="IdRef">027309320</idno>
          <idno type="ISNI">0000000121581279</idno>
          <idno type="ROR">https://ror.org/05hy3tk52</idno>
          <idno type="Wikidata">Q273626</idno>
          <orgName>École polytechnique</orgName>
          <orgName type="acronym">X</orgName>
          <date type="start">1794-03-11</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91128 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.polytechnique.edu/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-563936" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-563936" status="VALID">
          <idno type="IdRef">238327159</idno>
          <idno type="ISNI">0000000502717600</idno>
          <idno type="ROR">https://ror.org/042tfbd02</idno>
          <idno type="Wikidata">Q48759778</idno>
          <orgName>Institut Polytechnique de Paris</orgName>
          <orgName type="acronym">IP Paris</orgName>
          <date type="start">2019-06-02</date>
          <desc>
            <address>
              <addrLine>Route de Saclay, 91120 Palaiseau Cedex, France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.ip-paris.fr</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300372" status="VALID">
          <idno type="ROR">https://ror.org/05q65zh81</idno>
          <orgName>Ecole Nationale Supérieure de Chimie de Paris - Chimie ParisTech-PSL</orgName>
          <orgName type="acronym">ENSCP</orgName>
          <date type="start">2016-09-15</date>
          <desc>
            <address>
              <addrLine>11, rue Pierre et Marie Curie75231 Paris Cedex 05</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.chimie-paristech.fr/fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-564132" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-564132" status="VALID">
          <idno type="IdRef">241597595</idno>
          <idno type="ISNI">0000 0004 1784 3645</idno>
          <idno type="ROR">https://ror.org/013cjyk83</idno>
          <orgName>Université Paris Sciences et Lettres</orgName>
          <orgName type="acronym">PSL</orgName>
          <desc>
            <address>
              <addrLine>60 rue Mazarine 75006 Paris</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.psl.eu/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-542949" status="VALID">
          <orgName>Ministère de la Culture</orgName>
          <orgName type="acronym">MC</orgName>
          <date type="start">2017-05-17</date>
          <desc>
            <address>
              <addrLine>182 rue Saint-Honoré 75001 Pariis</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.culture.gouv.fr/</ref>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-50950" status="VALID">
          <idno type="anr">ANR-18-EURE-0006</idno>
          <orgName>E4C</orgName>
          <desc>Energy for Climate Interdisciplinary Instute</desc>
          <date type="start">2018</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>