Qualification of uniform large area multidipolar ECR hydrogen plasma - Archive ouverte HAL
Article Dans Une Revue Physics of Plasmas Année : 2022

Qualification of uniform large area multidipolar ECR hydrogen plasma

Résumé

The design and characterization of a multi-dipolar microwave electron cyclotron resonance (ECR) hydrogen plasma reactor are presented. In this configuration, 16 ECR sources are disposed uniformly along the azimuthal direction at a constant distance from the center of a cylindrical reactor. Several plasma diagnostics have been used to determine key parameters such as neutral species temperature; electron density and temperature; and H+, H2+, and H3+ ion energy distributions. The experimental characterization is supported by electromagnetic and magnetostatic field simulations as well as Particle In-Cell Monte Carlo Collisions simulations to analyze the observed ion energy distribution functions. Especially, we show that both electron density and temperature are spatially uniform, i.e., 1011 cm−3 and 3 eV, respectively. This plasma enables generating ion flux and energy in the ranges 1019–1022 ions m−2 s−1 and few keVs, respectively. The H2+ ion distribution function shows two populations which were attributed to surface effects. These features make this reactor particularly suitable for studying hydrogen plasma surface interaction under controlled conditions

Domaines

Plasmas
Fichier principal
Vignette du fichier
5.0083341.pdf (3.24 Mo) Télécharger le fichier
Origine Fichiers éditeurs autorisés sur une archive ouverte

Dates et versions

hal-03866173 , version 1 (22-11-2022)

Identifiants

Citer

L. Colina-Delacqua, M. Redolfi, Karim Ouaras, J. Naël-Redolfi, X. Bonnin, et al.. Qualification of uniform large area multidipolar ECR hydrogen plasma. Physics of Plasmas, 2022, 29 (4), pp.043508. ⟨10.1063/5.0083341⟩. ⟨hal-03866173⟩
52 Consultations
101 Téléchargements

Altmetric

Partager

More