Qualification of uniform large area multidipolar ECR hydrogen plasma - Archive ouverte HAL Access content directly
Journal Articles Physics of Plasmas Year : 2022

Qualification of uniform large area multidipolar ECR hydrogen plasma

L. Colina-Delacqua
  • Function : Author
M. Redolfi
J. Naël-Redolfi
  • Function : Author
X. Bonnin
A. Michau
K. Hassouni
G. Lombardi
  • Function : Author


The design and characterization of a multi-dipolar microwave electron cyclotron resonance (ECR) hydrogen plasma reactor are presented. In this configuration, 16 ECR sources are disposed uniformly along the azimuthal direction at a constant distance from the center of a cylindrical reactor. Several plasma diagnostics have been used to determine key parameters such as neutral species temperature; electron density and temperature; and H + , H 2 + , and H 3 + ion energy distributions. The experimental characterization is supported by electromagnetic and magnetostatic field simulations as well as Particle In-Cell Monte Carlo Collisions simulations to analyze the observed ion energy distribution functions. Especially, we show that both electron density and temperature are spatially uniform, i.e., 10 11 cm −3 and 3 eV, respectively. This plasma enables generating ion flux and energy in the ranges 10 19 –10 22 ions m −2 s −1 and few keVs, respectively. The H 2 + ion distribution function shows two populations which were attributed to surface effects. These features make this reactor particularly suitable for studying hydrogen plasma surface interaction under controlled conditions.
Not file

Dates and versions

hal-03866093 , version 1 (22-11-2022)



L. Colina-Delacqua, M. Redolfi, Karim Ouaras, J. Naël-Redolfi, X. Bonnin, et al.. Qualification of uniform large area multidipolar ECR hydrogen plasma. Physics of Plasmas, 2022, 29 (4), pp.043508. ⟨10.1063/5.0083341⟩. ⟨hal-03866093⟩
2 View
0 Download



Gmail Facebook Twitter LinkedIn More