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Article Dans Une Revue Physics of Plasmas Année : 2022

Qualification of uniform large area multidipolar ECR hydrogen plasma

L. Colina-Delacqua
  • Fonction : Auteur
M. Redolfi
J. Naël-Redolfi
  • Fonction : Auteur
X. Bonnin
A. Michau
K. Hassouni
G. Lombardi
  • Fonction : Auteur

Résumé

The design and characterization of a multi-dipolar microwave electron cyclotron resonance (ECR) hydrogen plasma reactor are presented. In this configuration, 16 ECR sources are disposed uniformly along the azimuthal direction at a constant distance from the center of a cylindrical reactor. Several plasma diagnostics have been used to determine key parameters such as neutral species temperature; electron density and temperature; and H + , H 2 + , and H 3 + ion energy distributions. The experimental characterization is supported by electromagnetic and magnetostatic field simulations as well as Particle In-Cell Monte Carlo Collisions simulations to analyze the observed ion energy distribution functions. Especially, we show that both electron density and temperature are spatially uniform, i.e., 10 11 cm −3 and 3 eV, respectively. This plasma enables generating ion flux and energy in the ranges 10 19 –10 22 ions m −2 s −1 and few keVs, respectively. The H 2 + ion distribution function shows two populations which were attributed to surface effects. These features make this reactor particularly suitable for studying hydrogen plasma surface interaction under controlled conditions.
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Dates et versions

hal-03866093 , version 1 (22-11-2022)

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Citer

L. Colina-Delacqua, M. Redolfi, Karim Ouaras, J. Naël-Redolfi, X. Bonnin, et al.. Qualification of uniform large area multidipolar ECR hydrogen plasma. Physics of Plasmas, 2022, 29 (4), pp.043508. ⟨10.1063/5.0083341⟩. ⟨hal-03866093⟩
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