Modelling of argon-acetylene dust-forming plasma
Résumé
The properties of an Ar/C2H2 dusty plasma (neutral, ion and electron densities, effective electron temperature and dust charge) are studied using a volume-averaged model. The steady-state plasma is considered, as well as the case when the dust radius varies with time in the same way as in our experiments. It is analysed how different process conditions (absorbed power, input flux of acetylene, electron energy distribution function and nanoparticle density) affect the plasma properties. The results of our calculations are compared with our experimental results on growth of nanoparticles in an Ar/C2H2 plasma and the results are found to be in a good qualitative agreement.
| Origine | Fichiers produits par l'(les) auteur(s) |
|---|