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              <p>NanoCarb is a miniature Fourier transform imaging spectrometer dedicated to the measurement of greenhouse gases (CO2 and CH4) from a constellation of small satellites. The key element of NanoCarb is an array of Fabry-Perot microinterferometers having a stepcase shape. Lateral dimensions and height of each step depend on the used material, the focusing lenses and the targetted optical path difference to be measured. In this paper, we describe a grayscale lithography process for a large surface patterning with high vertical resolution. This process is combined with plasma etching. Therefore, this two processes leads to a 20 nm step height resolution in resist and 50 nm in silicon. In addition to the manufacturing of this plate, we also investigated the deposit of a narrow-band filter on this plate used to select the spectral band of CO2 (1608 nm), with promising preliminary results.</p>
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              <p>NanoCarb est un spectromètre de Fourier miniature et imageur, dédié à la mesure des gaz à effet de serre (CO2 et CH4) par une constellation de petits satellites. Au coeur de NanoCarb est une matrice d'interféromètres de Fabry-Perot. Les dimensions latérales et les épaisseurs des interféromètres dépendent du matériau utilisé, de l'optique d'imagerie et des différences de marche à mesurer. Dans cet article, nous décrivons un procédé de lithographie en niveaux de gris adapté à des grandes largeurs et à une très haute résolution verticale. Ce procédé est complété par une gravure par plasma. On obtient ainsi des marches de 20nm dans la résine, soit 50 nm dans le silicium après gravure. En complément à la fabrication de cette matrice d'interféromètres, nous avons aussi étudié le dépôt d'un filtre étroit multi-couches pour sélectionner la bande d'intérêt du CO2 autour de 1608nm. les résultats préliminaires sont prometteurs.</p>
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