Microfabricated alkali vapor cells using local sealing
Abstract
We report on a new technique to form and seal micro-fabricated cells. The technique consists in integrating single-use sealing structures actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the glass-blowing techniques, we demonstrate “make-seals” and “break-seals” cells. This technique opens new
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https://hal.science/hal-03818572
Submitted on : Friday, October 21, 2022-10:37:01 AM
Last modification on : Thursday, August 29, 2024-9:40:57 AM
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- HAL Id : hal-03818572 , version 1
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Vincent Maurice, Ravinder Kumar Chutani, Clément Carlé, Shervin Keshavarzi, Samuel Queste, et al.. Microfabricated alkali vapor cells using local sealing. INMAQS Technical Workshop, Sep 2022, Talk, United Kingdom. ⟨hal-03818572⟩
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