Consideration of the electron energy distribution function shape in a Ar and N-2 global model - Archive ouverte HAL
Article Dans Une Revue AIP : Journal of Applied Physics Année : 2012

Consideration of the electron energy distribution function shape in a Ar and N-2 global model

N. Kang
  • Fonction : Auteur
S.G. Oh
  • Fonction : Auteur

Résumé

This paper presents a method to compensate the effects of the electron energy distribution function (EEDF) shape on plasma characteristics when using global models to describe Ar and N-2 inductively coupled discharges. A non-Maxwellian global model is developed for the pressure range 1-1000 mTorr by using an user-friendly Boltzmann equation solver to calculate the EEDF. The calculated EEDFs are compared with the measurements performed with a single Langmuir probe in the same conditions. We also compare the calculated results by using the Boltzmann equation solver with the results by assuming a Maxwellian EEDF and point out the influence of both methods on the contribution of the multi-step process on ionization. Finally, to take into account the shape of the EEDF in global models, abacuses are presented as a function of the absorbed power density and the pressure for typical Ar and N-2 planar ICP discharges.
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Dates et versions

hal-03815907 , version 1 (15-10-2022)

Identifiants

Citer

N. Kang, Freddy Gaboriau, S.G. Oh. Consideration of the electron energy distribution function shape in a Ar and N-2 global model. AIP : Journal of Applied Physics, 2012, 112 (10), pp.103303. ⟨10.1063/1.4765728⟩. ⟨hal-03815907⟩
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