Determination of the absolute nitrogen atom densitys in an Ar-N2 ICP discharge
Résumé
The absolute N atom density in low pressure Ar-N2 inductively coupled plasma (ICP) is numerically studied with simple gas kinetic model using measured electron temperature and electron density. In the calculation we found the charge transfer between Ar+ and N2 is the dominant source of N atoms at higher pressure. The calculated results are compared with measured values using two-photon absorption laser-induced fluorescence (TALIF). We observed that at 200 mTorr N atom density decreases as the N2 mixing ratio raises, while it is proportional to the N2 at 20 mTorr.