Determination of the absolute nitrogen atom densitys in an Ar-N2 ICP discharge - Archive ouverte HAL
Article Dans Une Revue Journal of the Korean Physical Society Année : 2011

Determination of the absolute nitrogen atom densitys in an Ar-N2 ICP discharge

N. Kang
  • Fonction : Auteur
S.G. Oh
  • Fonction : Auteur
André Ricard
  • Fonction : Auteur
  • PersonId : 1075726
  • IdRef : 050545329

Résumé

The absolute N atom density in low pressure Ar-N2 inductively coupled plasma (ICP) is numerically studied with simple gas kinetic model using measured electron temperature and electron density. In the calculation we found the charge transfer between Ar+ and N2 is the dominant source of N atoms at higher pressure. The calculated results are compared with measured values using two-photon absorption laser-induced fluorescence (TALIF). We observed that at 200 mTorr N atom density decreases as the N2 mixing ratio raises, while it is proportional to the N2 at 20 mTorr.
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Dates et versions

hal-03815906 , version 1 (15-10-2022)

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N. Kang, S.G. Oh, André Ricard, Freddy Gaboriau. Determination of the absolute nitrogen atom densitys in an Ar-N2 ICP discharge. Journal of the Korean Physical Society, 2011, 59 (5), pp.3031-3036. ⟨10.3938/jkps.59.3031⟩. ⟨hal-03815906⟩
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