Simple modeling of the E-H mode transition and hysteresis in low pressure argon ICP discharges for direct comparison with experiments - Archive ouverte HAL
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2011

Simple modeling of the E-H mode transition and hysteresis in low pressure argon ICP discharges for direct comparison with experiments

N. Kang
  • Fonction : Auteur

Résumé

The E-H mode transition and hysteresis in low pressure argon inductively coupled discharges are investigated using a global model and a transformer model. The total absorbed power by the plasma and the coil current are calculated as a function of the electron density at fixed RF injected power rather than fixed RF coil current as previously shown in the literature. We found that the transition corresponds to a difference of the absorbed power efficiency between E and H mode. The calculation results show the existence of an inaccessible region between E and H mode as well as a threshold coil current and a minimum absorbed power for the H mode. Hysteresis is well reproduced by this simple calculation and can be directly compared with experimental data

Dates et versions

hal-03815905 , version 1 (15-10-2022)

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Citer

N. Kang, Freddy Gaboriau. Simple modeling of the E-H mode transition and hysteresis in low pressure argon ICP discharges for direct comparison with experiments. Journal of Physics D: Applied Physics, 2011, 44 (44), pp.442001. ⟨10.1088/0022-3727/44/44/442001⟩. ⟨hal-03815905⟩
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