Erratum: Multi frequency matching for voltage waveform tailoring <A href="/abs/">(2018 Plasma Sources Sci. Technol. 27 095012</A>) - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Plasma Sources Science and Technology Année : 2019

Erratum: Multi frequency matching for voltage waveform tailoring (2018 Plasma Sources Sci. Technol. 27 095012)

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hal-03730658 , version 1 (20-07-2022)

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Frederik Schmidt, Julian Schulze, Erik Johnson, Jean-Paul Booth, Douglas Keil, et al.. Erratum: Multi frequency matching for voltage waveform tailoring (2018 Plasma Sources Sci. Technol. 27 095012). Plasma Sources Science and Technology, 2019, 28, pp.019601. ⟨10.1088/1361-6595/aaeb4b⟩. ⟨hal-03730658⟩
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