Failure of a brittle layer on a ductile substrate: Nanoindentation experiments and FEM simulations - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of the Mechanics and Physics of Solids Année : 2022

Failure of a brittle layer on a ductile substrate: Nanoindentation experiments and FEM simulations

G. Parry
D. Mercier

Résumé

Dealing with electronic devices for high reliability applications in terrestrial environments, neutron-induced Single Event Effects must be investigated. In this paper, the experimental observation of an atmospheric-like neutron-induced Single Event Burnout (SEB) on a packaged commercial SiC power MOSFET is presented after irradiation at ISIS-ChipIr. The effects of the SEB in the electrical properties of the MOSFET are established, and the SiC damaged zone is observed by scanning electron microscopy. Based on this failure analysis at the die level, the distinct stages during the SEB mechanism can be defined. The sensitive volume where the secondary particle deposited enough energy to trigger the SEB mechanism is identified and located inside the SiC n-drift epitaxial layer near the epitaxial layer/substrate junction.
Fichier principal
Vignette du fichier
Si3N4_cracking_under_nano_indentation_vRevised2.pdf (2.52 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03708224 , version 1 (04-10-2022)

Identifiants

Citer

M. Rusinowicz, G. Parry, F. Volpi, D. Mercier, S. Eve, et al.. Failure of a brittle layer on a ductile substrate: Nanoindentation experiments and FEM simulations. Journal of the Mechanics and Physics of Solids, 2022, 163, pp.104859. ⟨10.1016/j.jmps.2022.104859⟩. ⟨hal-03708224⟩
64 Consultations
53 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More