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Article Dans Une Revue Optics Express Année : 2022

High-fidelity glass micro-axicons fabricated by laser-assisted wet etching

Résumé

We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on a direct-writing process using a femtosecond laser, allows revealing high fidelity profiles when the exposed glass samples are etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then decreased by carbon dioxide (CO2) laser polishing. Such polishing is limited to the superficial layer of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 μm. It is then shown with 500 μm-diameter axicons that a quasi-Bessel beam is generated closely after the tip and features a 5.3 μm diameter maintained over a propagation distance of almost 3.5 mm. 
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Dates et versions

hal-03693032 , version 1 (10-06-2022)

Identifiants

  • HAL Id : hal-03693032 , version 1

Citer

Jean-Loup Skora, Olivier Gaiffe, Sylwester Bargiel, Jean-Marc Cote, Laurent Tavernier, et al.. High-fidelity glass micro-axicons fabricated by laser-assisted wet etching. Optics Express, 2022, 30 (3), pp.3749-3759. ⟨hal-03693032⟩
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