Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient - Archive ouverte HAL
Poster Communications Year : 2014
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hal-03675937 , version 1 (23-05-2022)

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  • HAL Id : hal-03675937 , version 1

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Marc Duquennoy, Mohammadi Ouaftouh, Julien Deboucq, J.E. Lefebvre, Frédéric Jenot, et al.. Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient. Symposium on Piezoelectric Micro and Nano Structures and their Applications, Sep 2014, Blois, France. ⟨hal-03675937⟩
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