Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond - Archive ouverte HAL Access content directly
Journal Articles Diamond and Related Materials Year : 2022

Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond

Abstract

The synthesis of n-type phosphorus-doped diamond is essential for the development of diamond-based bipolar devices. Although demonstrated 20 years ago, it remains a complex problem due to low incorporation efficiency and low maximum concentrations. Previous works showed the deleterious influence of methinophosphide formation in a methane/hydrogen/phosphine plasma on the growth of phosphorous doped diamond using the chemical vapor deposition method. In this work, we investigate the effect of pulsing methane during microwave plasma enhanced chemical vapor deposition to avoid the formation of HCP and to increase phosphorus incorporation efficiency and maximum concentration in diamond.
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hal-03672609 , version 1 (19-05-2022)

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V. Mortet, A. Taylor, M. Davydova, M. Lamač, N. Lambert, et al.. Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond. Diamond and Related Materials, 2022, 124, pp.108928. ⟨10.1016/j.diamond.2022.108928⟩. ⟨hal-03672609⟩
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