<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-03661108</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-17T10:41:16+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">A thorough investigation of MOSFETs NBTI degradation</title>
            <author role="aut">
              <persName>
                <forename type="first">V.</forename>
                <surname>Huard</surname>
              </persName>
              <idno type="halauthorid">496703-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Denais</surname>
              </persName>
              <idno type="halauthorid">1811000-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Perrier</surname>
              </persName>
              <idno type="halauthorid">72550-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">N.</forename>
                <surname>Revil</surname>
              </persName>
              <idno type="halauthorid">617855-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">C.</forename>
                <surname>Parthasarathy</surname>
              </persName>
              <idno type="halauthorid">1106168-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Alain</forename>
                <surname>Bravaix</surname>
              </persName>
              <email type="md5">5811756fda7711586347e051740ec554</email>
              <email type="domain">isen.fr</email>
              <idno type="idhal" notation="string">alain-bravaix</idno>
              <idno type="idhal" notation="numeric">1041446</idno>
              <idno type="halauthorid" notation="string">1496521-1041446</idno>
              <affiliation ref="#struct-544677"/>
              <affiliation ref="#struct-199957"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">E.</forename>
                <surname>Vincent</surname>
              </persName>
              <idno type="halauthorid">78092-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Alain</forename>
                <surname>BRAVAIX</surname>
              </persName>
              <email type="md5">259435def359a5c9595a7d57f3dab3b9</email>
              <email type="domain">yncrea.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-05-06 15:37:33</date>
              <date type="whenWritten">2005-01</date>
              <date type="whenModified">2024-06-10 16:58:03</date>
              <date type="whenReleased">2022-05-06 15:37:33</date>
              <date type="whenProduced">2005-01</date>
              <ref type="externalLink" target="https://api.istex.fr/ark:/67375/6H6-LJL56X8N-P/fulltext.pdf?sid=hal"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="685204">
                <persName>
                  <forename>Alain</forename>
                  <surname>BRAVAIX</surname>
                </persName>
                <email type="md5">259435def359a5c9595a7d57f3dab3b9</email>
                <email type="domain">yncrea.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-03661108</idno>
            <idno type="halUri">https://hal.science/hal-03661108</idno>
            <idno type="halBibtex">huard:hal-03661108</idno>
            <idno type="halRefHtml">&lt;i&gt;Microelectronics Reliability&lt;/i&gt;, 2005, 45 (1), pp.83-98. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.microrel.2004.04.027"&gt;&amp;#x27E8;10.1016/j.microrel.2004.04.027&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Microelectronics Reliability, 2005, 45 (1), pp.83-98. &amp;#x27E8;10.1016/j.microrel.2004.04.027&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLN">Université de Toulon</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-AMU">Aix Marseille Université</idno>
            <idno type="stamp" n="IM2NP" corresp="UNIV-TLN">IM2NP- UMR 7334</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">A thorough investigation of MOSFETs NBTI degradation</title>
                <author role="aut">
                  <persName>
                    <forename type="first">V.</forename>
                    <surname>Huard</surname>
                  </persName>
                  <idno type="halauthorid">496703-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Denais</surname>
                  </persName>
                  <idno type="halauthorid">1811000-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Perrier</surname>
                  </persName>
                  <idno type="halauthorid">72550-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">N.</forename>
                    <surname>Revil</surname>
                  </persName>
                  <idno type="halauthorid">617855-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">C.</forename>
                    <surname>Parthasarathy</surname>
                  </persName>
                  <idno type="halauthorid">1106168-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Alain</forename>
                    <surname>Bravaix</surname>
                  </persName>
                  <email type="md5">5811756fda7711586347e051740ec554</email>
                  <email type="domain">isen.fr</email>
                  <idno type="idhal" notation="string">alain-bravaix</idno>
                  <idno type="idhal" notation="numeric">1041446</idno>
                  <idno type="halauthorid" notation="string">1496521-1041446</idno>
                  <affiliation ref="#struct-544677"/>
                  <affiliation ref="#struct-199957"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">E.</forename>
                    <surname>Vincent</surname>
                  </persName>
                  <idno type="halauthorid">78092-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">17084</idno>
                <idno type="issn">0026-2714</idno>
                <idno type="eissn">1872-941X</idno>
                <title level="j">Microelectronics Reliability</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">45</biblScope>
                  <biblScope unit="issue">1</biblScope>
                  <biblScope unit="pp">83-98</biblScope>
                  <date type="datePub">2005-01</date>
                  <date type="dateEpub">2005-04</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.microrel.2004.04.027</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Decoupled Plasma Nitridation</term>
                <term xml:lang="en">Rapid Thermal Nitridation</term>
                <term xml:lang="en">centers</term>
                <term xml:lang="en">hydrogen traps</term>
                <term xml:lang="en">AC Stress</term>
                <term xml:lang="en">MOSFETs</term>
                <term xml:lang="en">Hot-carriers</term>
                <term xml:lang="en">Recovery effects</term>
                <term xml:lang="en">NBTI</term>
              </keywords>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>An overview of evolution of transistor parameters under negative bias temperature instability stress conditions commonly observed in p-MOSFETs in recent technologies is presented. The physical mechanisms of the degradation as well as the different defects involved have been discussed according to a systematic set of experiments with different stress conditions. According to our findings, a physical model is proposed which could be used to more accurately predict the transistor degradation. Finally, the influence of different process splits as the gate oxide nitridation, the nitrogen content, the source/drain implant and poly doping level on the NBTI degradation is investigated and discussed with our present understanding.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-23639" status="VALID">
          <orgName>STMicroelectronics [Crolles]</orgName>
          <orgName type="acronym">ST-CROLLES</orgName>
          <desc>
            <address>
              <addrLine>850 rue Jean Monnet BP 16 38926 Crolles</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.st.com</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-544677" status="INCOMING">
          <orgName>Yncréa Méditerrané</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-199957" status="VALID">
          <idno type="IdRef">142814105</idno>
          <idno type="RNSR">201220336G</idno>
          <idno type="ROR">https://ror.org/0238zyh04</idno>
          <idno type="Wikidata">Q51781330</idno>
          <orgName>Institut des Matériaux, de Microélectronique et des Nanosciences de Provence</orgName>
          <orgName type="acronym">IM2NP</orgName>
          <date type="start">2008-01-01</date>
          <desc>
            <address>
              <addrLine>Faculté des SciencesAvenue Escadrille Normandie NiemenCase 14213397 Marseille Cedex 20</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.im2np.fr/</ref>
          </desc>
          <listRelation>
            <relation name="UMR7334 /UMR6242" active="#struct-198056" type="direct"/>
            <relation name="UMR7334 /UMR6242" active="#struct-303091" type="direct"/>
            <relation name="UMR7334 / UMR6242" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-198056" status="VALID">
          <idno type="IdRef">15863621X</idno>
          <idno type="ISNI">0000 0001 2176 4817</idno>
          <idno type="ROR">https://ror.org/035xkbk20</idno>
          <orgName>Aix Marseille Université</orgName>
          <orgName type="acronym">AMU</orgName>
          <date type="start">2012-01-01</date>
          <desc>
            <address>
              <addrLine>Aix-Marseille UniversitéJardins du Pharo58 Boulevard Charles Livon13284 Marseille cedex 7</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-amu.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-303091" status="VALID">
          <idno type="IdRef">031122337</idno>
          <idno type="ROR">https://ror.org/02m9kbe37</idno>
          <orgName>Université de Toulon</orgName>
          <orgName type="acronym">UTLN</orgName>
          <desc>
            <address>
              <addrLine>Avenue de l'Université - BP 20132 - 83957 La Garde Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tln.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>