Poster Communications
Year : 2018
Collection IEMN : Connect in order to contact the contributor
https://hal.science/hal-03635053
Submitted on : Friday, April 8, 2022-10:48:05 AM
Last modification on : Friday, March 24, 2023-2:53:26 PM
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- HAL Id : hal-03635053 , version 1
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Dmitri Yarekha. Application de la gravure plasma à la réalisation des composants micro-nanoélectroniques à base du Si au sein de la centrale technologique de l’IEMN. Colloque LN2, Jul 2018, Autrans, France. 2018. ⟨hal-03635053⟩
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