Poster Communications
Year : 2019
Collection IEMN : Connect in order to contact the contributor
https://hal.science/hal-03635035
Submitted on : Friday, April 8, 2022-10:36:31 AM
Last modification on : Friday, March 24, 2023-2:53:26 PM
Dates and versions
Identifiers
- HAL Id : hal-03635035 , version 1
Cite
Dmitri Yarekha. Dry etching at IEMN. Euronanolab Dry Etch Expert meeting, Dec 2019, Saclay, France. 2019. ⟨hal-03635035⟩
Collections
10
View
0
Download