Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications - Archive ouverte HAL Access content directly
Conference Papers Year : 2020

Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications

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hal-03582674 , version 1 (21-02-2022)

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  • HAL Id : hal-03582674 , version 1

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Ahmad Hamieh, Freddy Ponchel, Denis Remiens. Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications. 17th International Workshop on Piezoelectric Materials and Applications in Actuators, IWPMA 2020, Sep 2020, Honnover, Germany. ⟨hal-03582674⟩
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