Conference Papers
Year : 2020
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https://uphf.hal.science/hal-03582674
Submitted on : Monday, February 21, 2022-1:24:14 PM
Last modification on : Wednesday, November 22, 2023-4:49:56 PM
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- HAL Id : hal-03582674 , version 1
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Ahmad Hamieh, Freddy Ponchel, Denis Remiens. Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications. 17th International Workshop on Piezoelectric Materials and Applications in Actuators, IWPMA 2020, Sep 2020, Honnover, Germany. ⟨hal-03582674⟩
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