[Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope - Archive ouverte HAL
Communication Dans Un Congrès Année : 2021
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hal-03582098 , version 1 (21-02-2022)

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  • HAL Id : hal-03582098 , version 1

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Kamel Haddadi. [Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope. 15th European Microwave Week - Workshop Measurements at mmWave and Terahertz Frequencies of Three Measurement Quantities: S-Parameters, Power, and Complex Permittivity of Dielectric Materials, Jan 2021, Utrecht, Netherlands. ⟨hal-03582098⟩
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