Mise en place d'une filière pour la réalisation de composants de puissance en diamant
Résumé
In this paper, advantages offered by diamond for power electronics and
technological issues that still need to be addressed are presented. Studies were carried out to
fabricate Ti/Pt/Au and Si/Al ohmic contacts on CVD diamond, both leading to a 5.10 -5 Ω.cm2
contact resistivity. Then a Schottky diode, exhibiting 1200 A/cm2 at 5 V, and a 25 V
breakdown voltage is presented. Finally, the development of a simulation platform is put
forward and discussed