Integrated design of mycro-electro-mechanical systems - Archive ouverte HAL
Article Dans Une Revue Strojniški vestnik = Journal of Mechanical Engineering Année : 2006

Integrated design of mycro-electro-mechanical systems

Matthieu Museau
Cédric Masclet

Résumé

This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.
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Dates et versions

hal-03560015 , version 1 (14-11-2024)

Identifiants

  • HAL Id : hal-03560015 , version 1

Citer

Matthieu Museau, Cédric Masclet. Integrated design of mycro-electro-mechanical systems. Strojniški vestnik = Journal of Mechanical Engineering, 2006, 52 (7-8), pp.506-514. ⟨hal-03560015⟩
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