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Communication Dans Un Congrès Année : 2020

Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications

Résumé

We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.
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Dates et versions

hal-03547247 , version 1 (31-01-2022)

Identifiants

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Clement Deleau, Han Cheng Seat, Helene Tap, Frederic Surre, Olivier D Bernal. Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications. 2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), May 2020, Dubrovnik, Croatia. pp.1-6, ⟨10.1109/I2MTC43012.2020.9129170⟩. ⟨hal-03547247⟩
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