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Communication Dans Un Congrès Année : 2021

Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3

Résumé

This work focuses on the theoretical and experimental investigation of acoustic waves sensors based on 2D Surface Phononic Crystals (PnC). We investigated the temperature coefficient of frequency (TCF) for surface localized modes in 2D PnCs composed of Ni pillars deposited on Y-cut LiNBO3 substrate. We demonstrated both theoretically and experimentally that near the first limit of the Brillouin zone, the surface acoustic wave's temperature sensitivity depends considerably on pillars stiffness temperature constants, theirs resonance modes and lattice symmetry of the PnC.
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Dates et versions

hal-03541057 , version 1 (24-01-2022)

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Abdelkrim Talbi, Ghizlane Boussatour, Aurelien Mazzamurro, Cécile Ghouila-Houri, Olivier Boumatar, et al.. Temperature Sensitivity of Surface Phononic Crystals modes (SPnC) based on Ni Pillars array deposited on LiNBO3. 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, Aug 2021, Paris, France. pp.1-3, ⟨10.1109/DTIP54218.2021.9568671⟩. ⟨hal-03541057⟩
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