Development of backing piezoelectric micromachined ultrasonic transducer (B-PMUT) 2D array
Résumé
To improve the problem of narrow bandwidth and large crosstalk in high-frequency PMUT array, a PMUT device with a damping backing structure (B-PMUT) is proposed and realized. The device is a two-dimensional array of 8×16 elements with an element pitch of 75 µm. The results show that the bandwidth of the device with backing is more than doubled (63%) to that of without backing. The crosstalk level between two neighboring elements decreased from −13.4 dB to −17 dB.
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