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Communication Dans Un Congrès Année : 2017

Experimental investigation of the lateral resolution of a homemade near field microwave microscope

Résumé

In this paper an experimental investigation of the lateral resolution of a homemade near field microwave microscope (NFMM) is reported. The optimal lateral resolution is studied by a thorough analysis of the influence of critical parameters such as the stand-off distance, the tip apex size and the working frequency. Thanks to the broadband matching network integrated in the interferometer-based NFMM, a high measurement sensitivity is guaranteed at operating frequencies spanning from 2 to 18 GHz. After demonstrating the impact of these key parameters on the lateral resolution improvement. A simple signal processing technique, the position/signal difference (PSD) method, is proposed to further enhance the resolution. © 2017 European Microwave Association.
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Dates et versions

hal-03538365 , version 1 (21-01-2022)

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Tianjun Lin, S. Gu, T. Lasri. Experimental investigation of the lateral resolution of a homemade near field microwave microscope. 47th European Microwave Conference, EuMC 2017, Oct 2017, Nuremberg, Germany. pp.827-830, ⟨10.23919/EuMC.2017.8230972⟩. ⟨hal-03538365⟩
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