Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator - Archive ouverte HAL
Article Dans Une Revue Actuators Année : 2021

Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator

Christine Prelle
Ajinkya Deshmukh
Laurent Petit
Muneeb-Ullah Khan
Frédéric Lamarque
  • Fonction : Auteur

Résumé

In this paper, a novel micro-positioning device based on a 3D digital actuator is presented. The proposed system allows realizing planar motions of micro-objects, which could be implemented in several applications where micro-positioning tasks are needed such as micro-component manufacturing/assembly, biomedicine, scanning microscopy, etc. The device has three degrees of freedom, and it is able to achieve planar motions of a mobile plate in the xy-plane at two different levels along the z-axis. It consists of a hexagonal mobile part composed of a permanent magnet that can reach twelve discrete positions distributed between two z-axis levels (six at each level). Two different approaches are presented to perform positioning tasks of the plate using the digital actuator: the stick-slip and the lift-mode approaches. A comparison between these two approaches is provided on the basis of the plate displacement with respect to different current values and conveyed mass. It was observed that for a current of 2 A, the actuator is able to displace a mass of 1.15 g over a distance of 0.08 mm. The optimal positioning range of the planar device was found to be ±5.40 mm and ±7.05 mm along the x- and y-axis, respectively.

Dates et versions

hal-03518656 , version 1 (10-01-2022)

Identifiants

Citer

Christine Prelle, Ajinkya Deshmukh, Laurent Petit, Muneeb-Ullah Khan, Frédéric Lamarque. Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator. Actuators, 2021, 10 (12), pp.310. ⟨10.3390/act10120310⟩. ⟨hal-03518656⟩
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