[Invited] H2S photoacoustic detection with an integrated THz gas sensor for food quality control

THz photoacoustic (PA) detection of H 2 S gas concentrations on the order of 200 ppm using a Poly-Si membrane as a PA microphone is reported. This result is a first step towards the demonstration of a fully integrated THz PA gas sensor with an expected sensitivity of 10’s of ppb.

Mots clés

membranes microphones photodetectors silicon submillimetre wave detectors submillimetre wave measurement terahertz wave detectors chemical variables measurement elemental semiconductors food technology gas sensors hydrogen compounds

Domaines

Optique / photonique Micro et nanotechnologies/Microélectronique Electronique

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https://hal.science/hal-03465148

Soumis le : vendredi 3 décembre 2021-16:41:38

Dernière modification le : jeudi 18 juillet 2024-10:20:56

Dates et versions

hal-03465148 , version 1 (03-12-2021)

Identifiants

HAL Id : hal-03465148 , version 1
DOI : 10.1109/IRMMW-THz50926.2021.9567307

Citer

Elias Akiki, Marie-Hélène Mammez, Guillaume Ducournau, Benjamin Walter, Gaël Mouret, et al.. [Invited] H2S photoacoustic detection with an integrated THz gas sensor for food quality control. 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), Aug 2021, Chengdu, China. pp.1-2, ⟨10.1109/IRMMW-THz50926.2021.9567307⟩. ⟨hal-03465148⟩

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