Silicon nitride drum based microwave optomechanical system for the thermal brownian motion sensing - Archive ouverte HAL
Communication Dans Un Congrès Année : 2020
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hal-03463810 , version 1 (02-12-2021)

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  • HAL Id : hal-03463810 , version 1

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Srisaran Venkatachalam, Ronghua Zhou, Andrew Fefferman, Mohammed Zaknoune, Eddy Collin, et al.. Silicon nitride drum based microwave optomechanical system for the thermal brownian motion sensing. 3rd IEEE Sensors France International Workshop 2020, Nov 2020, Lille, France. ⟨hal-03463810⟩
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