[Invited] SOI-based opto-mechanical Terahertz bolometer operating at room temperature with microsecond response time - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2021

[Invited] SOI-based opto-mechanical Terahertz bolometer operating at room temperature with microsecond response time

Résumé

We report the operation of a Terahertz (THz) detector exploiting the bi-material effect to resonantly excite a cantilever (CL) of micrometric size. The detector is fabricated on a SOI substrate and coupling to the incident THz radiation is obtained using two coupled aluminum half-dipole antennas. The induced CL deflection is readout optically with a 1.5 µ m laser. At 300K and 2.5THz, we obtain a peak responsivity of ~2 x 10 8 pm/W for the fundamental bending mode. This yields a NEP of ~20nW/Hz 1/2 at 2.5THz, i.e. of ~2nW/Hz 1/2 at 3.8THz, corresponding to the antenna peak absorption. Finally, the low mechanical quality factor of the mode grants a broad frequency response of approximately 100kHz, i.e. a response time of ~10 μs.
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Dates et versions

hal-03448757 , version 1 (25-11-2021)

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K. Froberger, Marc Faucher, B. Walter, M. Lavancier, Romain Peretti, et al.. [Invited] SOI-based opto-mechanical Terahertz bolometer operating at room temperature with microsecond response time. 2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), Aug 2021, Chengdu, China. pp.1-2, ⟨10.1109/IRMMW-THz50926.2021.9566981⟩. ⟨hal-03448757⟩
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