High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams - Archive ouverte HAL
Article Dans Une Revue Materials Année : 2021

High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams

Résumé

Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration.
Fichier principal
Vignette du fichier
313118f8-ca0e-48f9-964b-0da1bf3a9249-author.pdf (6.23 Mo) Télécharger le fichier
Origine Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03446901 , version 1 (26-10-2022)

Identifiants

Citer

Christian Vetter, Remo Giust, Luca Furfaro, Cyril Billet, Luc Froehly, et al.. High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams. Materials, 2021, 14 (22), pp.6749. ⟨10.3390/ma14226749⟩. ⟨hal-03446901⟩
36 Consultations
52 Téléchargements

Altmetric

Partager

More