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Journal Articles Semiconductor Science and Technology Year : 2021

Etching of m-plane Zn(Mg)O epitaxial films and its impact on surface leakage currents

Borislav Hinkov
Hanh Hoang
Jean-Michel Chauveau
Gottfried Strasser
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hal-03423387 , version 1 (22-11-2021)

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Borislav Hinkov, Hanh Hoang, Maxime Hugues, Jean-Michel Chauveau, Gottfried Strasser. Etching of m-plane Zn(Mg)O epitaxial films and its impact on surface leakage currents. Semiconductor Science and Technology, 2021, 36 (3), pp.035023. ⟨10.1088/1361-6641/abdd07⟩. ⟨hal-03423387⟩
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