Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors - Archive ouverte HAL
Communication Dans Un Congrès Année : 2015
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hal-03377046 , version 1 (13-10-2021)

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N. Sakamoto, Antoine Frappé, Bruno Stefanelli, Andreas Kaiser, Y. Mita. Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.1961-1964, ⟨10.1109/TRANSDUCERS.2015.7181337⟩. ⟨hal-03377046⟩
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