Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica - Archive ouverte HAL Access content directly
Journal Articles Chemistry of Materials Year : 2021

Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica

David Gajan
Anne Lesage
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hal-03365061 , version 1 (06-10-2021)

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Monu Kaushik, César Leroy, Zixuan Chen, David Gajan, Elena Willinger, et al.. Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica. Chemistry of Materials, 2021, 33 (9), pp.3335-3348. ⟨10.1021/acs.chemmater.1c00516⟩. ⟨hal-03365061⟩
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