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Communication Dans Un Congrès Année : 2021

Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method

Résumé

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PolyDiMethylSiloxane (PDMS) micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.
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Dates et versions

hal-03362264 , version 1 (04-10-2021)

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Abbas Salhab, Julien Carlier, Pierre Campistron, M. Neyens, Malika Toubal, et al.. Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method. 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021, Session 6 - Wet processing in narrow spaces and pattern collapse, Apr 2021, Virtual, Unknown Region. pp.143-149, ⟨10.4028/www.scientific.net/SSP.314.143⟩. ⟨hal-03362264⟩
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