In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities - Archive ouverte HAL
Article Dans Une Revue Laser and Photonics Reviews Année : 2021

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

Maxime Chambonneau
Onur Tokel
Fatih Ömer Ilday
  • Fonction : Auteur
Stefan Nolte

Résumé

Laser direct writing is a widely employed technique for 3D, contactless, and fast functionalization of dielectrics. Its success mainly originates from the utilization of ultrashort laser pulses, offering an incomparable degree of control on the produced material modifications. However, challenges remain for devising an equivalent technique in crystalline silicon which is the backbone material of the semiconductor industry. The physical mechanisms inhibiting sufficient energy deposition inside silicon with femtosecond laser pulses are reviewed in this article as well as the strategies established so far for bypassing these limitations. These solutions consisting of employing longer pulses (in the picosecond and nanosecond regime), femtosecond-pulse trains, and surface-seeded bulk modifications have allowed addressing numerous applications.
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Dates et versions

hal-03356944 , version 1 (28-09-2021)

Identifiants

Citer

Maxime Chambonneau, David Grojo, Onur Tokel, Fatih Ömer Ilday, Stelios Tzortzakis, et al.. In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities. Laser and Photonics Reviews, 2021, pp.2100140. ⟨10.1002/lpor.202100140⟩. ⟨hal-03356944⟩
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