Harvesting performances of a gap-closing MEMS energy harvester with squeeze-film damping
Résumé
This paper presents a study of a gap-closing comb-drive electrostatic resonator micro-electro-mechanical system (MEMS) subject to nonlinear squeeze-film damping. Its nonlinear behavior and its electrical equivalent are developed to predict its bandwidth and figure of merit (FOM). The electrical model of the MEMS is validated by simulation with LTspice. A linearized mechanical model validated for a displacement of 20% of the gap is also considered as a comparison. Finally, we propose a figure of merit to assess the efficiency of the MEMS considering its nonlinear behavior.
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