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https://hal.science/hal-03344016
Submitted on : Tuesday, September 14, 2021-2:50:28 PM
Last modification on : Friday, March 24, 2023-2:53:22 PM
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- HAL Id : hal-03344016 , version 1
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Gautier Tetard, Armelle Michau, Swaminathan Prasanna, Jonathan Mougenot, Pascal Brault, et al.. Charge gas and discharge parameters influence on kinetic and nucleation in RF Ar/C2H2 plasmas. PLATHINIUM 2021, Sep 2021, Online, France. ⟨hal-03344016⟩
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