Charge gas and discharge parameters influence on kinetic and nucleation in RF Ar/C2H2 plasmas - Archive ouverte HAL Access content directly
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hal-03344016 , version 1 (14-09-2021)

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  • HAL Id : hal-03344016 , version 1

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Gautier Tetard, Armelle Michau, Swaminathan Prasanna, Jonathan Mougenot, Pascal Brault, et al.. Charge gas and discharge parameters influence on kinetic and nucleation in RF Ar/C2H2 plasmas. PLATHINIUM 2021, Sep 2021, Online, France. ⟨hal-03344016⟩
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