A MEMS Turbopump for High-Temperature Rankine Micro Heat Engines—Part II: Experimental Demonstration - Archive ouverte HAL
Article Dans Une Revue Journal of Microelectromechanical Systems Année : 2020

A MEMS Turbopump for High-Temperature Rankine Micro Heat Engines—Part II: Experimental Demonstration

Résumé

This paper presents the experimental demonstration and characterization of a MEMS turbopump with thermal insulation for high temperature operation. The fabrication and design were presented in the first part of this two-part paper. The device consists of a five-wafer stack enclosing a hybrid silicon-glass rotor supported by fluid film bearings, manufactured using MEMS fabrication methods. The rotor consists of a 4-mm diameter disk with microturbine blades on one side and a spiral groove viscous pump on the other side. First, the bearings, turbine and pump operation are characterised, up to a rotational speed of 100 kRPM. The turbine provided 0.16 W of mechanical power and the pump flow rate was above 2.55 mg/s. Then, the first demonstration of a MEMS turbopump operating at elevated temperatures was accomplished. Comparison was made with a non-insulated rotor to prove the effectiveness of the thermal insulation strategies. The insulated MEMS turbopump was demonstrated at 160°C on the turbine side without boiling water on the pump side. This work therefore enables the implementation of efficient and high-power density power plants-on-a-chip for a wide range of waste heat recovery applications. [2020-0051].
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Dates et versions

hal-03341415 , version 1 (10-09-2021)

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Amrid Amnache, Mokhtar Liamini, Felix Gauthier, Philippe Beauchesne-Martel, Mohamed Omri, et al.. A MEMS Turbopump for High-Temperature Rankine Micro Heat Engines—Part II: Experimental Demonstration. Journal of Microelectromechanical Systems, 2020, 29 (5), pp.1293-1303. ⟨10.1109/JMEMS.2020.3008625⟩. ⟨hal-03341415⟩
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