Engineering visible light emitting point defects in Zr-implanted polycrystalline AlN films
A. Aghdaei
(1, 2, 3)
,
R. Pandiyan
(3)
,
B. Ilahi
(2, 1, 3)
,
M. Chicoine
(4)
,
M. El Gowini
(5)
,
F. Schiettekatte
(4)
,
L. Fréchette
(3, 6)
,
D. Morris
(2, 1, 3, 6)