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Communication Dans Un Congrès Année : 2019

A Micro-fabricated Hexagonal Digital Electromagnetic Actuator

Ajinkya Deshmukh
Laurent Petit
Muneeb Ullah Khan
Christine Prelle

Résumé

This paper presents a micro-fabricated digital electromagnetic actuator able to realize 3D displacements. The actuator consists of a mobile part, placed inside a silicon hexagonal cavity. The mobile part of an actuator can reach up to twelve discrete positions distributed between two different levels along z-axis(six positions at each level). The switching in xy-plane between the six positions is achieved using planar conductors placed beneath the cavity whereas, switching between the levels along z-axis is obtained with the help of an electromagnetic air-core coil. The cavity is surrounded with six cylindrical permanent magnets, in order to obtain magnetic holding. A semi-analytical model has been realized to design the prototype. Deep reactive Ion Etching(DRIE) process has been undertaken in order to obtain a microfabricated prototype. Experiments have been conducted to verify the ability of the actuator to reach twelve positions and to characterize the displacement stroke along x-, y- and z-axis.
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Dates et versions

hal-03331178 , version 1 (01-09-2021)

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Ajinkya Deshmukh, Laurent Petit, Muneeb Ullah Khan, Christine Prelle. A Micro-fabricated Hexagonal Digital Electromagnetic Actuator. 2019 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), Jul 2019, Hong Kong, China. pp.44-49, ⟨10.1109/AIM.2019.8868822⟩. ⟨hal-03331178⟩
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