Characterization of InP semiconductor waveguides coupled to disk microcavity optical resonators via opto-microwave technique
Résumé
We report on the opto-microwave characterization of InP waveguide-coupled to microcavity disk resonators. The lateral waveguide confinement is obtained by deep inductively-coupled plasma reactive-ion etching (ICP-RIE) through the guiding layer. We demonstrate the propagation of microwaves on an optical carrier in this resonant structure, which behaves as an opto-microwave filter or demultiplexer