Journal Articles
Journal of Applied Physics
Year : 2000
Jérôme Vasseur : Connect in order to contact the contributor
https://hal.science/hal-03301993
Submitted on : Tuesday, July 27, 2021-4:47:05 PM
Last modification on : Thursday, April 13, 2023-9:26:12 AM
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Jerome O. Vasseur, P. Deymier, J. Vasseur, A. Khelif, Bahram Djafari-Rouhani, et al.. Streaming and removal forces due to second-order sound field during megasonic cleaning of silicon wafers. Journal of Applied Physics, 2000, 88 (11), pp.6821-6835. ⟨10.1063/1.1323521⟩. ⟨hal-03301993⟩
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