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Article Dans Une Revue Journal of Applied Physics Année : 2000

Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning

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hal-03301906 , version 1 (27-07-2021)

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Jerome O. Vasseur, P. Deymier, A. Khelif, Bahram Djafari-Rouhani, J. Vasseur, et al.. Theoretical calculation of the acoustic force on a patterned silicon wafer during megasonic cleaning. Journal of Applied Physics, 2000, 88 (5), pp.2423-2429. ⟨10.1063/1.1287224⟩. ⟨hal-03301906⟩
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