Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Physical Chemistry C Année : 2020

Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation

Arnaud Valour
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Nicolas Crespo-Monteiro
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Damien Jamon
Yves Jourlin

Résumé

The miniaturization of optical components to control and manipulate light amplitude, phase, and polarization requires micro-to nanostructured metasurfaces that provide resonant light−matter interactions to exploit optical properties in the visible and near-infrared (NIR) range (plasmonic resonances, wavelength filtering, etc.). Such metasurfaces sometimes need to be implemented under hard-use conditions, including high temperatures and strong field confinement. Transition-metal nitrides, like titanium nitride (TiN), are ideal materials to achieve such properties, but TiN's hardness and chemical inertness make patterning difficult. Here, we present an innovative direct fabrication process to easily synthesize a micro−nanostructured TiN thin film. The technological process is based on a direct photo-patternable titanium oxide TiO 2 sol−gel layer converted into TiN with a rapid thermal nitridation process. The nanoarchitecture and chemical composition of TiO 2 and TiN films were investigated by ultraviolet (UV)− visible−infrared (IR) spectroscopy and Raman spectroscopy, grazing incidence X-ray diffraction (GIXRD), and high-resolution transmission electron microscopy (HRTEM) coupled with electron energy loss spectroscopy (EELS). We obtained micro−nanotextured crystallized TiN surfaces in a significantly shorter time than with conventional nitridation processes. Due to the sol−gel approach, this work also significantly extends the chances of obtaining TiNbased metasurfaces on various substrates (glasses, plastics, etc.) in complex shapes (non-planar-based surfaces), for demanding photonic applications in the future.

Domaines

Matériaux
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Dates et versions

hal-03273370 , version 1 (29-06-2021)

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Citer

Arnaud Valour, Maria A Usuga Higuita, Nicolas Crespo-Monteiro, Stéphanie Reynaud, Marion Hochedel, et al.. Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation. Journal of Physical Chemistry C, 2020, 124 (46), pp.25480 - 25488. ⟨10.1021/acs.jpcc.0c07157⟩. ⟨hal-03273370⟩
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