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Article Dans Une Revue Optical Materials Express Année : 2021

Resonant waveguide grating fabrication on planar and cylindrical substrates using a photosensitive TiO2 sol-gel approach

Hugo Bruhier
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Francis Vocanson
Arnaud Valour
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Damien Jamon
Nicolas Crespo-Monteiro
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Yves Jourlin

Résumé

A single-step sol-gel technological approach combining sol-gel layer development and UV lithography is demonstrated for the fabrication of resonant waveguide gratings (RWG) on planar and cylindrical substrates. The aim of this article is the demonstration of a resonant reflection in TE and TM polarization in the near-infrared region (NIR) in a planar and in cylindrical-based resonant waveguide gratings (RWG). In this work, we start with a planar corrugated waveguide structure excited by a planar wave and demonstrate this concept to a circularly symmetrical waveguide applied to the inside wall of an 8 mm diameter tube, excited by a cylindrical wave. For both configurations, the same TiO 2 sol-gel layer is used for the high index waveguide layer and for the grating printing thanks to the UV photosensitivity property of the sol-gel layers, avoiding any etching processes. The reflection spectrum was measured in the near-infrared range and compared to the modeling, showing the expected resonant behavior.
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Dates et versions

hal-03273355 , version 1 (29-06-2021)

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Maria Alejandra Usuga Higuita, Hugo Bruhier, Marion Hochedel, Thomas Kampfe, Francis Vocanson, et al.. Resonant waveguide grating fabrication on planar and cylindrical substrates using a photosensitive TiO2 sol-gel approach. Optical Materials Express, 2021, 11 (1), pp.12-22. ⟨10.1364/ome.411560⟩. ⟨hal-03273355⟩
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