Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel - Archive ouverte HAL Access content directly
Journal Articles Journal of Materials Research and Technology Year : 2021

Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel

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hal-03261738 , version 1 (16-06-2021)

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Sebastian M J Beer, Diane Samelor, Alsayed Abdel Aal, Johannes Etzkorn, Detlef Rogalla, et al.. Direct liquid injection chemical vapor deposition of ZrO2 films from a heteroleptic Zr precursor: interplay between film characteristics and corrosion protection of stainless steel. Journal of Materials Research and Technology, 2021, 13, pp.1599 - 1614. ⟨10.1016/j.jmrt.2021.05.068⟩. ⟨hal-03261738⟩
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